>> P.303
ExampleofanIdentificationNumber1213456SA120DE/5XYSR4SA…DE:AlignmentStageSA65:□65,φ65120:□120,φ120200:□200,φ2001:0.1μm5:0.5μmSpecifytheresolutionoftheencoderforX-axisorXY-axis.WhenselectingonlyS:θ-axisintheentryofsection4,set"Nosymbol"fortheresolution.SelectanaxialconfigurationfromthelistofTable1.Nosymbol:ElectrolessnickelplatingR:BlackchromesurfacetreatmentSurfacetreatmentisperformedonthesurfacesoftableandbed.4:Specificationnumber4Table1AxialconfigurationandapplicationAxialconfigurationSA65DESA120DESA200DEX:OnlyX-axis○○○S:Onlyθ-axis○○○XY:XY-basedtwo-axisconfiguration○○○XS:Xθbasedtwo-axisconfiguration○○○XYS:X,Y,andθ-basedthree-axisconfiguration○○○PageⅡ-279PageⅡ-279PageⅡ-279PageⅡ-279PageⅡ-279PageⅡ-279Size2Model1Axialconfiguration4Resolution3Surfacetreatment5Specificationnumber6Model1Size2Resolution3Axialconfiguration4Surfacetreatment5Specificationnumber6Ⅱ279IdentificationNumberandSpecificationIdentificationNumberIDnumberselectiontool
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