>> P.304
Table2.1Specification/PerformanceIdentificationnumberItemSA65DE/1XSA65DE/5XSA120DE/1XSA120DE/5XSA200DE/1X(8)SA200DE/5X(8)Maximumthrust(1)N2570400(250)Ratedthrust(2)N3.515(7)70Effectivestrokelengthmm102020Maximumloadmasskg2.45.930.0(20.0)Resolutionμm0.10.50.10.50.10.5Maximumspeed(3)4)mm/s270500270800270800Positioningrepeatability(5)μm±0.5Massofmovingtablekg0.171.23.4Totalmass(6)kg0.352.57.2Ambienttemperatureandhumidityinoperation0〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Forthecaseofexceedingthedisplayedspeed,pleasecontactIKO.(4)hismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(5)Whenthetemperatureoftheproductisconstant.(6)Massofthecordisnotincluded.(7)Theratedthrustapplieswithintheeffectivestrokerange.(8)NumbersinparenthesesindicatevalueswhenusedwithanADVA-R5MLdriver.Table2.2Specification/PerformanceIdentificationnumberItemSA65DE/SSA120DE/SSA200DE/S(7)Maximumtorque(1)N・m0.52.08.0(6.0)Ratedtorque(2)N・m0.060.42.0Maximumloadmasskg2.26.821.2(17.1)Effectiveoperatingangledegree5060280Resolutionsec0.640.360.25pulse/degree56251000014400Maximumspeed(3)4)degree/sec720400270Positioningrepeatability(5)sec±1.3±0.8±0.5Inertiamomentofmovingtablekg・m20.000120.0020.013Totalmass(6)kg0.526Ambienttemperatureandhumidityinoperation0〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumtorqueisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Forthecaseofexceedingthedisplayedspeed,pleasecontactIKO.(4)hismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(5)Whenthetemperatureoftheproductisconstant.(6)Massofthecordisnotincluded.(7)NumbersinparenthesesindicatevalueswhenusedwithanADVA-R5MLdriver.Fig.1DynamicloadmassRemark:Dynamicloadmassofθ-axisisavaluecalculatedascubeofsteel.And,theaccelerationisconvertedasvalueofstageperiphery.0.10.011101001010.10.01110100101DynamicloadmasskgAccelerationm/s2〈X(Y)-axis〉DynamicloadmasskgPeripheralaccelerationm/s2〈θ-axis〉SA200DE/X(200V)SA200DE/X(100V)SA120DE/XSA65DE/XSA200DE/S(200V)SA200DE/S(100V)SA120DE/SSA65DE/SSpecificationsⅡ280
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