>> P.304
SpecificationsTable2.1Specification/PerformanceIdentificationnumberNNmmkgμmmm/sItemMaximumthrust(1)Ratedthrust(2)EffectivestrokelengthMaximumloadmassResolutionMaximumspeed(3)4)Positioningrepeatability(5)μmMassofmovingtableTotalmass(6)AmbienttemperatureandhumidityinoperationkgkgSA65DE/1XSA65DE/5XSA120DE/1XSA120DE/5XSA200DE/1X(8)SA200DE/5X(8)253.5102.40.170.350.12707015(7)205.9400(250)702030.0(20.0)0.55000.12700.58000.12700.5800±0.51.22.53.47.20〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Forthecaseofexceedingthedisplayedspeed,pleasecontactIKO.(4)Thismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(5)Whenthetemperatureoftheproductisconstant.(6)Massofthecordisnotincluded.(7)Theratedthrustapplieswithintheeffectivestrokerange.(8)NumbersinparenthesesindicatevalueswhenusedwithanADVA-R5MLdriver.Table2.2Specification/PerformanceIdentificationnumberN・mN・mkgdegreesecpulse/degreedegree/seckg・m2ItemMaximumtorque(1)Ratedtorque(2)MaximumloadmassEffectiveoperatingangleResolutionMaximumspeed(3)4)Positioningrepeatability(5)secInertiamomentofmovingtableTotalmass(6)AmbienttemperatureandhumidityinoperationkgSA65DE/SSA120DE/SSA200DE/S(7)0.50.062.2500.645625720±1.30.000120.52.00.46.8600.3610000400±0.80.00228.0(6.0)2.021.2(17.1)2800.2514400270±0.50.01360〜40℃・20〜80%RH(keepdewdropfree)Ⅱ280Notes(1)Thedurationofmaximumtorqueisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Forthecaseofexceedingthedisplayedspeed,pleasecontactIKO.(4)Thismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(5)Whenthetemperatureoftheproductisconstant.(6)Massofthecordisnotincluded.(7)NumbersinparenthesesindicatevalueswhenusedwithanADVA-R5MLdriver.〈X(Y)-axis〉〈θ-axis〉SA200DE/S(200V)SA200DE/S(100V)SA120DE/SSA65DE/S10100Peripheralaccelerationm/s21010.1Dynamicloadmasskg0.011SA200DE/X(200V)SA200DE/X(100V)SA120DE/XSA65DE/X1.giFDynamicloadmass10Accelerationm/s21001010.1Dynamicloadmasskg0.011Remark:Dynamicloadmassofθ-axisisavaluecalculatedascubeofsteel.And,theaccelerationisconvertedasvalueofstageperiphery.
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