>> P.13
ModelsandSizeVariations④AVarietyofModelsandVariationsAlignmentStageSASA···DELinearmotordriveLinearAlignment●Slimandcompactdesignwithsectionalheightof3axes,X,Yandθbeingonly52mm(SA65DE)●X-andY-axis:0.1μm,θ-axis:excellentresolutionashighas0.36sec(SA120DE)●FreeandindependentcombinationofX,YandθMaximumstrokeMaximumoperatingangleMaximumspeedResolution10(mm)20(mm)20(mm)50(degree)60(degree)280(degree)500(mm/s)800(mm/s)800(mm/s)720(degree/s)400(degree/s)270(degree/s)0.1,0.5(μm)0.1,0.5(μm)0.1,0.5(μm)0.64(s)0.36(s)0.25(s)AccuracyPositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashSeepageⅡ–276SpecificationModelandsizeSA65DE/XSA120DE/XSA200DE/XSA65DE/SSA120DE/SSA200DE/SⅠ13
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