>> P.12
NanoLinearTMNTStandardTypeNT···VLinearmotordriveLinear●Pursuingultimatecompactification●VerylowprofileofNT30V:only8mm●Awidevarietyofselectionssupportoptimalchoiceaccordingtoyouruse.●Highacceleration/decelerationensuringhighlyresponsivepositioning●Two-axiscombinationofXandYHighAccuracyTypeNT···HLinearmotordriveLinear●Pursuingultimatecompactification●Highattitudeaccuracy●Highspeedstability●SimplesystemconfigurationPickandPlaceUnitNT···XZNT···XZHLinearmotordriveLinear●Pursuingultimatecompactification●High-tactpositioning●Ultrathinandspacesaving●OperationmonitoringfunctionSpecificationAccuracyModelandsizeMaximumstrokeMaximumspeedResolution(mm)(mm/s)(μm)NT30VNT38VNT55VNT80VNT88HNT80XZNT90XZH20186512065452550050013001300400130013000.1,0.50.1,0.50.1,0.50.1,0.50.01,0.050.1,0.50.1,0.5ItemNT···VNT···HNT···XZPositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashSeepageⅡ–244Ⅰ12