>> P.14
CompactTypeLT···CE●Compact●Highstaticstability●Highspeedstability●Highacceleration/decelerationandhighresponse●LongtermmaintenancefreespecificationwithC-LubebuiltinLongStrokeTypeLT···LD●Superlongstroke●Highstaticstability●Highspeedstability●Bothhighspeedandhighresolutionareachieved.●LongtermmaintenancefreespecificationwithC-LubebuiltinHighThrustTypeLT···H●Highthrust●Highacceleration/deceleration,highresponseandsmoothoperations●Highstaticstability●Air-coolingcapable●LongtermmaintenancefreespecificationwithC-LubebuiltinLinearmotordriveLinearmotordriveLinearmotordriveModelandsizeLT100CELT150CELT130LDLT170LDLT170H100012002760272026700.1,0.5,1.00.1,0.5,1.00.1,0.5,1.00.1,0.5,1.00.1,0.5,1.020002000300030001500Maximumstroke(mm)Maximumspeed(mm/s)Resolution(μm)PositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashItemLT···CELT···LDLT···HAccuracyLinearMotorTableLTLinearLinearLinearSpecificationSeepageⅡ–294Ⅰ14
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