>> P.14
LinearMotorTableLTCompactTypeLT···CELinearmotordriveLinear●Compact●Highstaticstability●Highspeedstability●Highacceleration/decelerationandhighresponse●LongtermmaintenancefreespecificationwithC-LubebuiltinLongStrokeTypeLT···LDLinearmotordriveLinear●Superlongstroke●Highstaticstability●Highspeedstability●Bothhighspeedandhighresolutionareachieved.●LongtermmaintenancefreespecificationwithC-LubebuiltinHighThrustTypeLT···HLT···H2LinearmotordriveLinear●Highthrust●Highacceleration/deceleration,highresponseandsmoothoperations●Highstaticstability●Air-coolingcapable●LongtermmaintenancefreespecificationwithC-LubebuiltinSpecificationAccuracyModelandsizeMaximumstrokeMaximumspeedResolution(mm)(mm/s)(μm)LT100CELT150CELT130LDLT170LDLT170HLT170H21000120027602720267027502000200030003000150030000.1,0.5,1.00.1,0.5,1.00.1,0.5,1.00.1,0.5,1.00.1,0.5,1.00.1,0.5,1.0ItemLT···CELT···LDLT···HLT···H2PositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashSeepageⅡ–294Ⅰ14