>> P.196
TC50EB150(볼스크류의리드:4mm)스트로크:50mm속도:200mm/s흡인량:5L/minTC50EB300(볼스크류의리드:8mm)스트로크:200mm속도:400mm/s흡인량:10L/min클래스5상한클래스4상한클래스3상한클래스2상한클래스1상한측정치100000100001000100101입자농도개/m3클래스5상한클래스4상한클래스3상한클래스2상한측정치클래스1상한100000100001000100101입자농도개/m30.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경0.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경TC60EB300(볼스크류의리드:10mm)스트로크:200mm속도:500mm/s흡인량:30L/minTC60EB600(볼스크류의리드:10mm)스트로크:500mm속도:500mm/s흡인량:30L/min클래스5상한클래스4상한클래스3상한클래스2상한측정치클래스1상한100000100001000100101입자농도개/m3클래스5상한클래스4상한클래스3상한클래스2상한측정치클래스1상한100000100001000100101입자농도개/m30.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경0.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경0.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경클래스5상한클래스4상한클래스3상한클래스2상한측정치클래스1상한100001000100입자농도개/m3101TC86EB940(볼스크류의리드:20mm)100000스트로크:800mm속도:560mm/s흡인량:40L/min클래스5상한클래스4상한클래스3상한측정치클래스2상한클래스1상한0.1μm이상0.2μm이상0.3μm이상0.5μm이상입자직경100000100001000100101입자농도개/m3TC86EB640(볼스크류의리드:20mm)스트로크:500mm속도:1000mm/s흡인량:70L/min흡인량L/min청정도클래스(JISB9920:2002)5101030303030407040클래스2클래스2클래스2클래스3클래스3클래스3클래스3클래스3클래스3클래스3Ⅱ-172속도mm/s2002004002505005005005001000560mm5010020050200500200500500800mm4485101010102020볼스크류의리드스트로크●청정도측정결과형식과크기배드길이TC50EBTC60EBTC86EB150200300150300600340640640940비고청정도는사용환경및운전조건에따라다를수있습니다.청정도실측데이터●측정데이터예[청정도클래스상한농도그래프]