>> P.413
Ⅲ13AccuracyAccuracystandardofprecisionpositioningtablevariesdependingonmodelsandmeasurementmethodsaredescribedbelow.Inaddition,modeltestingaccordingtotheuseconditionssuchasdynamicstestingmaybeconductedonrequest.PleasecontactIKOfordetails.Precisionpositioningtableissuppliedwithaninspectionsheetorcertificateofpassinginspectionregardingaccuracystandardofeachmodel.PositioningrepeatabilityRepeatpositioningtoanyonepointfromonedirection7timestomeasurethestoppositionandobtain1/2ofthemaximumreadingdifference.Inprinciple,performthismeasurementatthecenterandeachendofthestrokelengthandtakethemaximumobtainedvalueasthemeasurementvalue.Indicatethe1/2ofthemaximumdifferencewith±.PositioningaccuracyPerformpositioningsuccessivelyinthecertaindirectionfromthereferenceposition,measurethedifferencebetweenactualtraveldistanceateachpositionandthetheoreticaltraveldistance,andindicatethemaximumdifferencewithinthestrokelengthasanabsolutevalue.Attitudeaccuracy(pitchingandyawing)Thetiltanglesforpitchingdirection(Mp)andyawingdirection(My)ofthetablewithinthestrokerangearemeasuredwithalaseranglemeasurementsystem,andthemeasuredvalueisthevalueofthemaximumreadingerror.●Pitching(Mp)Verticalanglechangeontabletravelaxis●Yawing(My)HorizontalanglechangeontabletravelaxisParallelismintablemotionAReferstoparallelism(indicatorfix)oftheslidetablemotionandflatsurface(precisionpositioningtablemountingsurface).●WhenthestrokeisshorterthantheslidetablelengthFixthetestindicatoronthestoolonwhichtheprecisionpositioningtableismounted,placethestraight-edgeontheslidetable,andapplythetestindicatoratthecenteroftheslidetable.MakeameasurementacrossalmostwholeareaofthestrokelengthinXandYdirections,andtakethemaximumreadingdifferenceasameasurementvalue.●WhenthestrokeislongerthantheslidetablelengthFixthetestindicatoronthestoolonwhichtheprecisionpositioningtableismounted,placethestraight-edgeontheslidetable,andapplythetestindicatoratthecenteroftheslidetable.MakeameasurementacrossalmostwholeareaofthestrokelengthwhilemovingthetablebythelengthofthetableduringstrokesinXandYdirections,andtakethemaximumreadingdifferenceasameasurementvalue.ℓ1ℓ2ℓ71/2oflargestdifferenceinmeasurementvalues,ℓ1,ℓ2,…ℓ7MeasurementintervalTravelingdistanceL⊿L⊿L=(Distanceactuallytraveled)-(Commandvaluefortravelingdistance)ReferencepositionMyMpXY
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