>> P.301
AlignmentStageSASA・・・DELinearmotordriveLinearAlignmentθ-tableCrossedrollerbearingMovingmagnetMechanicalstopperStatorcoilMovingmagnetStatorcoilX-tableLinearWayOpticallinearencoderscaleheadMechanicalstopperMajorproductspecificationsAccuracyDrivingmethodLinearmotorLinearmotionrollingguideandbearingXY-axis:LinearWay(balltype)θ-axis:CrossedRollerBearingLubricationLubricationpart"C-Lube"isbuilt-in(exceptforθ-axisandSA65DE/X)MaterialoftableandbedHighcarbonsteelSensorProvidedasstandardⅡ277PositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashunit:mmXY-axis:±0.0005θ-axis:±0.5～1.3sec-------
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