>> P.301
θ-tableOpticallinearencoderscaleheadMechanicalstopperX-tableLinearWayCrossedrollerbearingMovingmagnetMechanicalstopperStatorcoilStatorcoilMovingmagnetLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklash------XY-axis:±0.0005θ-axis:±0.5～1.3secAlignmentStageSADrivingmethodMaterialoftableandbedSensorLinearmotorXY-axis:LinearWay(balltype)Lubricationpart"C-Lube"isbuilt-inHighcarbonsteelProvidedasstandardθ-axis:CrossedRollerBearing(exceptforθ-axisandSA65DE/X)SA・・・DELinearmotionrollingguideandbearingLubricationPositioningrepeatabilityPositioningaccuracy-MajorproductspecificationsAccuracyunit:mmLinearmotordriveAlignmentLinearⅡ277
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