>> P.200
1N=0.102kgf=0.2248lbs.1mm=0.03937inchActualmeasurementdataofcleanliness●Exampleofmeasurementdata[Upperconcentrationlimitchartforeachcleanlinessclass]TC50EB150(Ballscrewlead:4mm)Stroke:50mmSpeed:200mm/sSuctionamount:5L/minTC50EB300(Ballscrewlead:8mm)Stroke:200mmSpeed:400mm/sSuctionamount:10L/min100000100000100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2MeasurementvalueUpperlimitofclass10.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1Measurementvalue0.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterTC60EB300(Ballscrewlead:10mm)Stroke:200mmSpeed:500mm/sSuctionamount:30L/minTC60EB600(Ballscrewlead:10mm)Stroke:500mmSpeed:500mm/sSuctionamount:30L/min100000100000100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2MeasurementvalueUpperlimitofclass10.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2MeasurementvalueUpperlimitofclass10.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterTC86EB640(Ballscrewlead:20mm)Stroke:500mmSpeed:1000mm/sSuctionamount:70L/minTC86EB940(Ballscrewlead:20mm)Stroke:800mmSpeed:560mm/sSuctionamount:40L/min100000100000100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3MeasurementvalueUpperlimitofclass2Upperlimitofclass10.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter100001000100101Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2MeasurementvalueUpperlimitofclass10.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterSuctionamountL/minCleanlinessclass(JISB9920:2002,ISO14644-1:1999)5101030303030407040Class2Class2Class2Class3Class3Class3Class3Class3Class3Class3Ⅱ176Speedmm/s2002004002505005005005001000560●MeasurementresultofcleanlinessModelandsizeBedlengthBallscrewleadmmStrokelengthmm50100200502005002005005008004485101010102020150200300150300600340640640940TC50EBTC60EBTC86EBRemark:Cleanlinessvariesdependingonoperatingenvironmentandoperatingconditions.Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3
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