>> P.200
1502003001503006003406406409404485101010102020501002005020050020050050080020020040025050050050050010005605101030303030407040SuctionamountL/minClass2Class2Class2Class3Class3Class3Class3Class3Class3Class3BedlengthBallscrewleadmmStrokelengthmmSpeedmm/sCleanlinessclass(JISB9920:2002,ISO14644-1:1999)TC60EB300(Ballscrewlead:10mm)TC86EB640(Ballscrewlead:20mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass1MeasurementvalueUpperlimitofclass21000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3ParticlediameterParticlediameterUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1MeasurementvalueStroke:200mmSpeed:500mm/sSuctionamount:30L/minTC60EB600(Ballscrewlead:10mm)TC86EB940(Ballscrewlead:20mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3ParticlediameterUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass1MeasurementvalueUpperlimitofclass21000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3ParticlediameterUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass1MeasurementvalueUpperlimitofclass2Stroke:500mmSpeed:500mm/sSuctionamount:30L/minTC50EB150(Ballscrewlead:4mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3ParticlediameterStroke:50mmSpeed:200mm/sSuctionamount:5L/minTC50EB300(Ballscrewlead:8mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticleconcentrationnumberofparticles/m3ParticlediameterStroke:200mmSpeed:400mm/sSuctionamount:10L/minStroke:800mmSpeed:560mm/sSuctionamount:40L/minStroke:500mmSpeed:1000mm/sSuctionamount:70L/minRemark:Cleanlinessvariesdependingonoperatingenvironmentandoperatingconditions.●Measurementresultofcleanliness●Exampleofmeasurementdata[Upperconcentrationlimitchartforeachcleanlinessclass]ModelandsizeTC50EBTC60EBTC86EBActualmeasurementdataofcleanlinessUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1Upperlimitofclass1MeasurementvalueMeasurementvalueUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Ⅱ1761N=0.102kgf=0.2248lbs.1mm=0.03937inch
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