>> P.199
CleanroomPrecisionPositioningTableTCAboutmeasurementofcleanlinessCleanlinessreferstoclassifiedaircleanlinesslevelsbasedonsize(particlediameter)andquantityofsuspendedparticulatesperunitvolume.IKOmeasurescleanlinessbyfollowingtheprocedures.●Measuringcondition●AppearanceoftestdeviceItemContentMeasuringequipmentParticlecounterAirflowvelocityofmeasurementpart2.5m/sMeasuredairquantity28.3L(1cf)Measurementtime48h(10min/measurement,1measurement/h)●Outlineoftestdevice【Measurementenvironment】Cleanbenchincleanroom(cleanairwithdrawinginacryliccover)CleanairAcryliccoverAirflowvelocityofmeasurementpart2.5m/sTosuctionpumpToparticlecounter●Upperconcentrationlimitofeachcleanlinessclass(JISB9920:2002,ISO14644-1:1999)unit:numberofparticles/m3CleanlinessClass1Class2Class3(FederalStandard209DClass1)Class4(FederalStandard209DClass10)Class5(FederalStandard209DClass100)Class6(FederalStandard209DClass1000)Ⅱ1750.1μmorlarger0.2μmorlarger0.3μmorlarger0.4μmorlargerParticlediameter101001000100001000001000000224237237023700237000-10102102010200102000-435352352035200
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