>> P.199
Cleanlinessreferstoclassifiedaircleanlinesslevelsbasedonsize(particlediameter)andquantityofsuspendedparticulatesperunitvolume.IKOmeasurescleanlinessbyfollowingtheprocedures.CleanroomPrecisionPositioningTableTCItemMeasuringequipmentAirflowvelocityofmeasurementpartMeasuredairquantityMeasurementtimeContentParticlecounter2.5m/s28.3L(1cf)48h(10min/measurement,1measurement/h)unit:numberofparticles/m3CleanlinessParticlediameter101001000100001000001000000224237237023700237000-10102102010200102000-435352352035200【Measurementenvironment】Cleanbenchincleanroom(cleanairwithdrawinginacryliccover)CleanairAirflowvelocityofmeasurementpart2.5m/sTosuctionpumpToparticlecounterAcryliccover●Upperconcentrationlimitofeachcleanlinessclass(JISB9920:2002,ISO14644-1:1999)●Measuringcondition●Outlineoftestdevice●AppearanceoftestdeviceAboutmeasurementofcleanlinessClass1Class2Class3(FederalStandard209DClass1)Class4(FederalStandard209DClass10)Class5(FederalStandard209DClass100)Class6(FederalStandard209DClass1000)0.1μmorlarger0.2μmorlarger0.3μmorlarger0.4μmorlargerⅡ175
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