>> P.180
Table5 LinearencodercodeLinearencodertypeSymbolWithoutlinearencoderIncrementallinearencoderAbsolutelinearencoderS0000SA000SC000SB010SB020SB040SB050SB100SB200SD010SD020SD040SD050SD100SD200SE050SF050SG050SupportedACservomotors-YaskawaElectricCorporationΣ-7Resolution[μm]-VariableVariableLinearencodermodel-HEIDENHAINK.K.LIF181RRenishawplc.TONiC0.010.020.040.050.10.20.010.020.040.050.10.20.050.050.05MitsubishiElectricCorporationJ4(1)andPanasonicCorporationMINASA6YaskawaElectricCorporationΣ-7MitsubishiElectricCorporationJ4PanasonicCorporationMINASA6HEIDENHAINK.K.LIF181RRenishawplc.VIONiCRenishawplc.RESOLUTENote(1)RemarksPleaseuseanMR-J4-***-RJdriver.1.2.FordetailsofSA000andSC000variableresolution,seeTable7.Forlinearencoderspecification,seeTable11.ParallelismAttitudeaccuracy(2)StraightnessinverticalStraightnessinhorizontal0.0030.0040.0030.0040.0050.0040.0050.0050.0060.0080.0050.0060.008unit:mmSquarenessofXYmotion----0.0050.0100.0050.010Ⅱ156PositioningRepeatabilityPositioningaccuracyLostmotion(1)±0.0005(±0.001)0.0010.003(0.006)0.004(0.008)0.003(0.006)intablemotionA0.0050.0060.005±0.0005(±0.001)0.004(0.008)0.0010.006±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)0.005(0.013)0.004(0.008)0.005(0.013)0.005(0.013)0.006(0.016)0.008(0.020)0.005(0.007)0.005(0.010)0.006(0.010)0.008(0.010)0.0010.0010.0070.0060.0070.0070.0080.0090.0010.0080.0010.0090.011sec56567677898911SpecificationsTable6 AccuracyModelandsizeStrokelengthX-axisY-axis100150200250300150200250300400300400500500600800100200200300200300300400100100200200200200300300TX120MTX220MTX320MTX420MCTX120MCTX220MSingle-axisspecificationTwo-axisspecificationNotes(1)Whennolinearencoderisused,thisrepresentsthevalueforbacklash.Remark:Thevaluesin()indicatevalueswithoutalinearencoder.(2)Thisrepresentsaccuracyinpitchingandyawing.