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Table6 Accuracyunit:mmModelandsizeStrokelengthPositioningRepeatabilityPositioningaccuracyLostmotion(1)ParallelismintablemotionAAttitudeaccuracy(2)secStraightnessinverticalStraightnessinhorizontalSquarenessofXYmotionX-axisY-axisSingle-axisspecificationTX120M100±0.0005(±0.001)0.003(0.006)0.0010.00550.003-1502000.004(0.008)0.00660.004250300TX220M150±0.0005(±0.001)0.003(0.006)0.0010.00550.003-2000.004(0.008)0.00660.0042503004000.005(0.013)0.00770.005TX320M300±0.0005(±0.001)0.004(0.008)0.0010.00660.004-4000.005(0.013)0.00770.005500TX420M500±0.0005(±0.001)0.005(0.013)0.0010.00770.005-6000.006(0.016)0.00880.0068000.008(0.020)0.00990.008Two-axisspecificationCTX120M100100±0.0005(±0.001)0.005(0.007)0.0010.00880.0050.0052001000.005(0.010)0.010200200300200CTX220M200200±0.0005(±0.001)0.006(0.010)0.0010.00990.0060.0053002000.0103003004003000.008(0.010)0.011110.008Notes(1)Whennolinearencoderisused,thisrepresentsthevalueforbacklash.(2)Thisrepresentsaccuracyinpitchingandyawing.Remark:Thevaluesin()indicatevalueswithoutalinearencoder.Table5 LinearencodercodeLinearencodertypeSymbolSupportedACservomotorsResolution[μm]LinearencodermodelWithoutlinearencoderS0000---IncrementallinearencoderSA000YaskawaElectricCorporationΣ-7VariableHEIDENHAINK.K.LIF181RSC000VariableRenishawplc.TONiCSB010MitsubishiElectricCorporationJ4(1)andPanasonicCorporationMINASA60.01HEIDENHAINK.K.LIF181RSB0200.02SB0400.04SB0500.05SB1000.1SB2000.2SD0100.01Renishawplc.VIONiCSD0200.02SD0400.04SD0500.05SD1000.1SD2000.2AbsolutelinearencoderSE050YaskawaElectricCorporationΣ-70.05Renishawplc.RESOLUTESF050MitsubishiElectricCorporationJ40.05SG050PanasonicCorporationMINASA60.05Note(1)PleaseuseanMR-J4-***-RJdriver.Remarks1.FordetailsofSA000andSC000variableresolution,seeTable7.2.Forlinearencoderspecification,seeTable11.Ⅱ156Specifications
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