>> P.354
조합의예■XY-θ다축위치결정기구의구성얼라이먼트테이블AT는단축사양ㆍ다축사양의IKO정밀위치결정테이블과조합시킨것으로써,간단히XY-θ다축위치결정기구를구성할수있습니다.조립높이가낮은컴팩트高정밀도위치결정이가능하기때문에정밀측정기ㆍ검사기ㆍ조립기등의얼라이먼트용테이블로사용할수있습니다.표6다축위치결정구조의구성예다축위치결정구조의외관얼라이먼트테이블AT에조합한IKO정밀위치결정테이블의형식정밀위치결정테이블TSㆍCT정밀위치결정테이블LH단축사양2축사양TS125/125TS125/220TS220/220TS220/310TS260/350CT125/125CT220/220CT260/350CT350/350TSLH120M단축사양TSLH220MTSLH320MTSLH420MCTLH120M2축사양CTLH220MCTLH320M단위mm스트로크X축Y축501201201802505012015025050120250250100,150200250300150200,250,300400300400,500500600800100200200300300200300300400400300400400500500100100200200300200200300300400300300400400500Ⅱ-330