>> P.348
■XY-θ다축위치결정기구의구성얼라이먼트테이블AT는단축사양ㆍ다축사양의IKO정밀위치결정테이블과조합시킨것으로써,간단히XY-θ다축위치결정기구를구성할수있습니다.조립높이가낮은컴팩트高정밀도위치결정이가능하기때문에정밀측정기ㆍ검사기ㆍ조립기등의얼라이먼트용테이블로사용할수있습니다.표6다축위치결정구조의구성예단위mm다축위치결정구조의외관얼라이먼트테이블AT에조합한IKO정밀위치결정테이블의형식스트로크X축Y축정밀위치결정테이블TSㆍCT단축사양TS125/12550TS125/220120TS220/220120TS220/310180TS260/3502502축사양CT125/1255050CT220/220120120CT260/350150250CT350/350250250정밀위치결정테이블LH단축사양TSLH120M100,150200250300TSLH220M150200,250,300400TSLH320M300400,500TSLH420M5006008002축사양CTLH120M100100200100200200300200300300CTLH220M200200300200300300400300400400CTLH320M300300400300400400500400500500Ⅱ-324조합의예
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