>> P.13
형식과크기SA65DE/XSA120DE/XSA200DE/XSA65DE/SSA120DE/SSA200DE/S10(mm)20(mm)20(mm)50(도)60(도)80(도)0.1,0.5(μm)0.1,0.5(μm)0.1,0.5(μm)0.64(초)0.36(초)0.25(초)500(mm/s)800(mm/s)800(mm/s)720(도/s)400(도/s)270(도/s)최대스트로크최대동작각도최고속도분해능SA···DE●XYθ3축을조합한단면높이가불과52mm의박형ㆍ컴팩트(SA65DE)●XY축:0.1μm,θ축:0.36초의高분해능(SA120DE)●XYθ의조합이자유자재형식ㆍ사이즈별제품군④다양한형식ㆍ풍부한제품군얼라이먼트스테이지SA정밀도리니어모터구동반복위치결정정밀도위치결정정밀도로스트모션테이블운동의평행도A테이블운동의평행도B자세정밀도진직도백레쉬직선얼라이먼트사양페이지로가기Ⅱ-272Ⅰ-13
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