>> P.429
TravelingdistanceLReferenceposition⊿L=(Distanceactuallytraveled)-(Commandvaluefortravelingdistance)AccuracyAccuracystandardofprecisionpositioningtablevariesdependingonmodelsandmeasurementmethodsaredescribedbelow.Inaddition,modeltestingaccordingtotheuseconditionssuchasdynamicstestingmaybeconductedonrequest.PleasecontactIKOfordetails.Precisionpositioningtableissuppliedwithaninspectionsheetorcertificateofpassinginspectionregardingaccuracystandardofeachmodel.ℓ1ℓ2ℓ71/2oflargestdifferenceinmeasurementvalues,ℓ1,ℓ2,…ℓ7MeasurementintervalPositioningrepeatabilityRepeatpositioningtoanyonepointfromonedirection7timestomeasurethestoppositionandobtain1/2ofthemaximumreadingdifference.Inprinciple,performthismeasurementatthecenterandeachendofthestrokelengthandtakethemaximumobtainedvalueasthemeasurementvalue.Indicatethe1/2ofthemaximumdifferencewith±.⊿LPositioningaccuracyPerformpositioningsuccessivelyinthecertaindirectionfromthereferenceposition,measurethedifferencebetweenactualtraveldistanceateachpositionandthetheoreticaltraveldistance,andindicatethemaximumdifferencewithinthestrokelengthasanabsolutevalue.MyMpXYAttitudeaccuracy(pitchingandyawing)Thetiltanglesforpitchingdirection(Mp)andyawingdirection(My)ofthetablewithinthestrokerangearemeasuredwithalaseranglemeasurementsystem,andthemeasuredvalueisthevalueofthemaximumreadingerror.●Pitching(Mp)Verticalanglechangeontabletravelaxis●Yawing(My)HorizontalanglechangeontabletravelaxisParallelismintablemotionAReferstoparallelism(indicatorfix)oftheslidetablemotionandflatsurface(precisionpositioningtablemountingsurface).●WhenthestrokeisshorterthantheslidetablelengthFixthetestindicatoronthestoolonwhichtheprecisionpositioningtableismounted,placethestraight-edgeontheslidetable,andapplythetestindicatoratthecenteroftheslidetable.MakeameasurementacrossalmostwholeareaofthestrokelengthinXandYdirections,andtakethemaximumreadingdifferenceasameasurementvalue.●WhenthestrokeislongerthantheslidetablelengthFixthetestindicatoronthestoolonwhichtheprecisionpositioningtableismounted,placethestraight-edgeontheslidetable,andapplythetestindicatoratthecenteroftheslidetable.MakeameasurementacrossalmostwholeareaofthestrokelengthwhilemovingthetablebythelengthofthetableduringstrokesinXandYdirections,andtakethemaximumreadingdifferenceasameasurementvalue.Ⅲ13
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