>> P.401
ParallelDriveStageTMPDPD・・・STableC-LubeLinearWayBasePrecisionBallScrewP2axisBallscrewXYdirectionServomotorP1axisMajorproductspecificationsAccuracyDrivingmethodPrecisionBallScrewPositioningrepeatability±0.002UnitmmLinearmotionrollingguideLinearWay(balltype)PositioningaccuracyBuilt-inlubricationpartLubricationpartC-Lubeisbuilt-inLostmotionMaterialoftableandbaseAluminumalloySensor-Ⅱ377ParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklash-------
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