>> P.374
Points●Positioningmoduleenablingvariousmotions●FlexibilityoffreelydesigningthestageaccordingtotheusageThisunithelpsyoufreelydesignthealignmentstageaccordingtotheusagebycombiningvariousstagesandbasesintotheAlignmentModuleAM.3ThisisapositioningmoduledevelopedforalignmentstagebycombiningthehighrigidityCrossedRollerBearingandLinearWaybasedonthePrecisionPositioningTableTU.●Largestageof□2,000classisalsosupported!12●Heightadjustmentisnotrequired.Toleranceofheightdimensionismanagedathighprecisionof±10μm.AlignmentstagecanbeconfiguredwithoutadjustingtheheightsofrespectiveAlignmentModuleAM.2000mm2000mmAlignmentModuleAMConfigurationexampleandoperatingprincipleofalignmentstageReferencepositionXmotionYmotionXYmotionCenterreferenceanglecompensationArbitrarypositionreferenceanglecompensationVariationShapeWHLModelandsizeAM25AM40AM60AM86SizeW×L×H(mm)86×130×47120×180×78220×290×110350×390×148Strokelength(mm)303090120Ⅱ350
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