>> P.368
Points1ThisisapositioningmoduledevelopedforalignmentstagebycombiningthehighrigidityCrossedRollerBearingandLinearWaybasedonthePrecisionPositioningTableTU.3ThisunithelpsyoufreelydesignthealignmentstageaccordingtotheusagebycombiningvariousstagesandbasesintotheAlignmentModuleAM.2●Heightadjustmentisnotrequired.Toleranceofheightdimensionismanagedathighprecisionof±10μm.AlignmentstagecanbeconfiguredwithoutadjustingtheheightsofrespectiveAlignmentModuleAM.●Largestageof□2,000classisalsosupported!VariationConfigurationexampleandoperatingprincipleofalignmentstageShapeModelandsizeStrokelength(mm)AM25SizeW×L×H(mm)86×130×4730AM40120×180×7830AM60220×290×11090AM86350×390×148120LHWAlignmentModuleAM2000mm2000mm●Positioningmoduleenablingvariousmotions●FlexibilityoffreelydesigningthestageaccordingtotheusageReferencepositionXmotionYmotionXYmotionCenterreferenceanglecompensationArbitrarypositionreferenceanglecompensationⅡ344
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