>> P.352
■ConfigurationofXY-θmulti-axispositioningmechanismCombiningtheAlignmentTableATwithIKOprecisionpositioningtableofsingle-axisspecificationormulti-axisspecificationenablesyoutoeasilyconfiguretheXY-θmulti-axispositioningmechanism.Lowassemblingheight,compactness,andhigh-precisionpositioningcapabilityenablethetabletobeusedasalignmenttableforprecisionmeasuringequipment,inspectionequipment,andassemblingdevice.Table6Configurationexampleofmulti-axispositioningmechanismunit:mmAppearanceofmulti-axispositioningmechanismModelsofIKOprecisionpositioningtablescombinedwithAlignmentTableATStrokelengthX-axisY-axisPrecisionPositioningTableTS/CTSingle-axisspecificationTS125/12550TS125/220120TS220/220120TS220/310180TS260/350250Two-axisspecificationCT125/1255050CT220/220120120CT260/350150250CT350/350250250PrecisionPositioningTableLHSingle-axisspecificationTSLH120M100,150200250300TSLH220M150200,250,300400TSLH320M300400,500TSLH420M500600800Two-axisspecificationCTLH120M100100200100200200300200300300CTLH220M200200300200300300400300400400CTLH320M300300400300400400500400500500Ⅱ328ExampleofCombination
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