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SpecificationsTable4Specification/PerformanceofNT80VModelandsizeItemMaximumthrust(1)Ratedthrust(2)MaximumloadmassEffectivestrokelengthResolutionMaximumspeed(3)Positioningrepeatability(4)MassofmovingtableTotalmass(5)AmbienttemperatureandhumidityinoperationNT80V25NT80V65NT80V120NNkgmmμm250.1mm/s2701000(6)μmkgkg0.280.683685651200.513000.12701000(6)0.513000.12701000(6)0.51300±0.50.280.830.471.40〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Thismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(4)Whenthetemperatureoftheproductisconstant.(5)Massofthecordisnotincluded.(6)Applicabletohighspeedspecification.Table5Specification/PerformanceofNT…HModelandsizeItemMaximumthrust(1)Ratedthrust(2)MaximumloadmassEffectivestrokelengthResolutionMaximumspeed(3)Positioningaccuracy(4)Positioningrepeatability(5)ParallelisminmotionAAttitudeaccuracy(6)StraightnessinverticalandstraightnessinhorizontalMassofmovingtableTotalmass(7)AmbienttemperatureandhumidityinoperationNNkgmmμmmm/sμmμmμmSecμmkgkgNT88H25NT88H650.0540025551±0.15510.0190250.71.60.054000.0190650.920〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Thismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(4)Thevalueisforthetemperatureofambientandproductbeing20℃.(5)Whenthetemperatureoftheproductisconstant.(6)Thisrepresentsaccuracyinpitchingandyawing.(7)Massofthecordisnotincluded.Table6Specification/PerformanceofNT・・・XZandNT・・・XZHModelandsizeNT80XZ4510ItemMaximumthrust(1)Ratedthrust(2)MaximumloadmassEffectivestrokelengthResolutionMaximumspeed(3)Positioningrepeatability(4)MassofmovingtableTotalmass(5)AmbienttemperatureandhumidityinoperationNNkgmmμmmm/s270μmkgkgX-axis5010450.1Z-axis252.510NT90XZH2510X-axisZ-axis70Naturalaircooling:16Aircooling(6):20250.20.51300270±0.5100.11000(7)0.510000.11000(7)0.50.11300270800(7)0.58000.11000(7)2700.6(8)±0.51.60.120.380.352.80〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)Thismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(4)Whenthetemperatureoftheproductisconstant.(5)Massofthecordisnotincluded.(6)Thisisunderairflowof20NL/min.(7)Applicabletohighspeedspecification.(8)MassofmovingtableofZ-axisisincluded.Ⅱ257
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