>> P.281
Table5Specification/PerformanceofNT・・・XZandNT・・・XZHModelandsizeItemNT80XZ4510NT90XZH2510X-axisZ-axisX-axisZ-axisMaximumthrust(1)N502570Ratedthrust(2)N102.5Naturalaircooling:16Aircooling(6):20Maximumloadmasskg0.10.2Effectivestrokelengthmm45102510Resolutionμm0.10.50.10.50.10.50.10.5Maximumspeed(3)mm/s2701000(7)1300270800(7)8002701000(7)13002701000(7)1000Positioningrepeatability(4)μm±0.5±0.5Massofmovingtablekg0.6(8)0.120.380.35Totalmass(5)kg1.62.8Ambienttemperatureandhumidityinoperation0〜40℃・20〜80%RH(keepdewdropfree)Notes(1)Thedurationofmaximumthrustisupto1second.(2)Thisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)hismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(4)Whenthetemperatureoftheproductisconstant.(5)Massofthecordisnotincluded.(6)Thisisunderairflowof20NL/min.(7)Applicabletohighspeedspecification.(8)MassofmovingtableofZ-axisisincluded.Table4Specification/PerformanceofNT…HModelandsizeItemNT88H25NT88H65Maximumthrust(1)N25Ratedthrust(2)N5Maximumloadmasskg5Effectivestrokelengthmm2565Resolutionμm0.010.050.010.05Maximumspeed(3)mm/s9040090400Positioningaccuracy(4)μm1Positioningrepeatability(5)μm±0.1ParallelisminmotionAμm5Attitudeaccuracy(6)Sec5Straightnessinverticalandstraightnessinhorizontalμm1Massofmovingtablekg0.70.9Totalmass(7)kg1.62Ambienttemperatureandhumidityinoperation0〜40℃・20〜80%RH(keepdewdropfree)Notes1)Thedurationofmaximumthrustisupto1second.(2)hisisbasedonthecaseofmountingonametalmatingmembermaterialatanambienttemperatureof20℃.(3)hismaximumspeedmaynotbereacheddependingonthemaximumoutputfrequencyofthecontrollerused,andthedrivertypeorsettings.(4)Thevalueisforthetemperatureofambientandproductbeing20℃.(5)Whenthetemperatureoftheproductisconstant.(6)Thisrepresentsaccuracyinpitchingandyawing.(7)Massofthecordisnotincluded.Ⅱ257Specifications
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