>> P.273
123[Highaccuracytype]NT…Hisahigh-accuracylinearmotortablethathasrealizedhighrigidityandsmoothmotionswithoutpulsationcomparativewithairstaticpressurebearingbypositioningaccuracyandrunningstraightnessbelow1μm,usingrollertypeAnti-CreepCageCrossedRollerWayinthetableguidingparts.Points●Highattitudeaccuracy●Highspeedstability●HighrunningaccuracyErrorinrunningstraightnessμm5Positionmm0Runningstraightness:1μmorlessPositionmmAttitudeaccuracysec300-301020304050PitchingYawingAttitudeaccuracy:5secorless0Speedmm/s11Times010.810.610.410.2109.89.69.49.210mm/sspeedstability(measuredfrequency:1000Hz):±1%orlessCombinationofpartsprocessedwithhighaccuracyandAnti-CreepCageCrossedRollerWayrealizesattitudeaccuracyof5secorless.Variationsinattitudeduetomovementisminimized,whichensureshighpositioningrepeatability.Speedstabilityisimprovedfurtherthankstosmooth-motionCrossedRollerWay,corelessmovingmagnettypelinearmotorandhigh-performanceservodriver.Highrunningaccuracyasgoodaslessthan1μmrunningstraightnessisrealizedbyprecisefinishingandassemblyofcomponents.NT…HNanoLinearNTMovingtableOpticallinearencoderscaleheadMovingmagnetOpticallinearencoderscaleStatorcoilAnti-CreepCageCrossedRollerWayBedⅡ249
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