>> P.273
BedAnti-CreepCageCrossedRollerWayStatorcoilOpticallinearencoderscale30Attitudeaccuracy:5secorlessPitchingYawing-3001020304050Positionmm1110.810.610.410.2109.89.69.49.205010mm/sspeedstability(measuredfrequency:1000Hz):±1%orlessTimesRunningstraightness:1μmorlessPositionmmAttitudeaccuracysecSpeedmm/sErrorinrunningstraightnessμm0Points1●HighattitudeaccuracyCombinationofpartsprocessedwithhighaccuracyandAnti-CreepCageCrossedRollerWayrealizesattitudeaccuracyof5secorless.Variationsinattitudeduetomovementisminimized,whichensureshighpositioningrepeatability.2●HighspeedstabilitySpeedstabilityisimprovedfurtherthankstosmooth-motionCrossedRollerWay,corelessmovingmagnettypelinearmotorandhigh-performanceservodriver.3●HighrunningaccuracyHighrunningaccuracyasgoodaslessthan1μmrunningstraightnessisrealizedbyprecisefinishingandassemblyofcomponents.Ⅱ249NanoLinearTMNTNT…H[Highaccuracytype]NT…Hisahigh-accuracylinearmotortablethathasrealizedhighrigidityandsmoothmotionswithoutpulsationcomparativewithairstaticpressurebearingbypositioningaccuracyandrunningstraightnessbelow1μm,usingrollertypeAnti-CreepCageCrossedRollerWayinthetableguidingparts.MovingtableOpticallinearencoderscaleheadMovingmagnet
| < 
| 
> | 
>>
