>> P.237
SpecificationsTable4AccuracyIdentificationnumberSingle-axisspecificationTS55/55-TS75/75TS125/125TS125/220TS220/220TS220/310TS260/350-Two-axisspecification-55/75/55CTCT75CT125/125-CT220/220-CT260/350CT350/350PositioningrepeatabilityPositioningaccuracyParallelismintablemotionAParallelismintablemotionBSquarenessofXYmotion(1)2)unit:mm±0.0020.0050.0100.0050.0080.0150.0050.0150.0050.0080.0200.008Note(1)Appliedtotableswithtwo-axisspecification.(2)Doesnotcontainastraightnesscomponent.Table5MaximumspeedMotortypeACservomotorSteppermotorLead1mm5030Maximumspeedmm/sLead2mm10060Lead5mm250150Remark:Tomeasurethepracticalmaximumspeed,itisrequiredtoconsideroperationpatternsbasedonthemotortobeusedandloadconditions.Ⅱ213
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