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Ⅱ213Table4Accuracyunit:mmIdentificationnumberPositioningrepeatabilityPositioningaccuracyParallelismintablemotionAParallelismintablemotionBSquarenessofXYmotion(1)2)Single-axisspecificationTwo-axisspecificationTS55/55-±0.0020.0050.0050.0150.005-CT55/550.010TS75/75CT75/750.005TS125/125CT125/125TS125/220-0.008TS220/220CT220/220TS220/310-0.0150.0080.0200.008TS260/350CT260/350-CT350/350Note(1)Appliedtotableswithtwo-axisspecification.(2)Doesnotcontainastraightnesscomponent.Table5MaximumspeedMotortypeMaximumspeedmm/sLead1mmLead2mmLead5mmACservomotor50100250Steppermotor3060150Remark:omeasurethepracticalmaximumspeed,itisrequiredtoconsideroperationpatternsbasedonthemotortobeusedandloadconditions.Specifications
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