>> P.215
BallscrewLinearMotorMicroPrecisionPositioningTableTMTMAngularbearingSlidetableCoverBedSensorBallscrewLinearWayMajorproductspecificationsAccuracyDrivingmethodPrecisionballscrewPositioningrepeatability±0.001~0.002LinearmotionrollingguideLinearWay(balltype)Positioningaccuracy0.015unit:mmBuilt-inlubricationpartNobuilt-inMaterialoftableandbedStainlesssteelLostmotionParallelismintablemotionASensorSelectbyidentificationnumberParallelismintablemotionBAttitudeaccuracyStraightnessBacklash------Ⅱ191