>> P.211
CleanroomPrecisionPositioningTableTCleanroomPreisionPositioningTableTCmanualInstructionCAD(A)17(n-1)×90L1A1358Rc1/8Alsoontheotherside432212.52×n-M6Depth7*Neverinsertaboltofdepthexceedingaspecifiedvalue.40.5BedlengthOveralllengthStrokelengthMountingholesofbedMass(Ref.)unit:mmL1150200300400500600L225275375475575675S50100200300400500A301015202530n234567kg1.11.31.72.02.42.7Remark:Motorattachmentforsteppermotoris8mmlowerthanthebottomofthebed.82.4Withsensor30.541.524.563.929306039.5542-Rc1/8(67.8)S/2344-M5Depth10L48308410104451S/2TC60EBⅡ187
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