>> P.197
CleanroomPrecisionPositioningTableTCTC・・・EBBallscrewLinearMotorbracketCouplingcoverSlidetableLinearWaySidecoverStainlesssheetPipethreadsforsuctionconnectorBallscrewBedEndbracketPipethreadsforsuctionconnectorMajorproductspecificationsAccuracyDrivingmethodPrecisionballscrewPositioningrepeatability±0.002LinearmotionrollingguideLinearWay(balltype)Positioningaccuracy0.035～0.065Built-inlubricationpartLubricationpart"C-Lube"isbuilt-inLostmotionMaterialoftableandbedHigh-strengthaluminumalloyParallelismintablemotionA--SensorSelectbyidentificationnumberParallelismintablemotionB0.008～0.016unit:mmAttitudeaccuracyStraightnessBacklash--0.005Ⅱ173
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