>> P.197
TC・・・EBDrivingmethodLinearmotionrollingguideBuilt-inlubricationpartMaterialoftableandbedSensorPositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklash±0.0020.035～0.065--0.008～0.016--0.005PrecisionballscrewLinearWay(balltype)Lubricationpart"C-Lube"isbuilt-inHigh-strengthaluminumalloySelectbyidentificationnumberCleanroomPrecisionPositioningTableTCunit:mmMajorproductspecificationsAccuracyBallscrewLinearCouplingcoverBallscrewPipethreadsforsuctionconnectorBedEndbracketPipethreadsforsuctionconnectorStainlesssheetSlidetableSidecoverLinearWayMotorbracketⅡ173
| < 
| 
> | 
>>
