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TX220Munit:mmIdentificationnumberStrokelengthSOveralllengthLMountingholesofbedMass(Ref.)kgA(thenumberofholes×pitch)nTX220M-15015040085834TX220M-200200450110837TX220M-250250500135839TX220M-300300550160842TX220M-400400650210(2×105)1247(15)S/2220S/2(15)(25)A180A2547902209.418Holeforn-M8(45)220190120190L154-M5Depth104-M8Depth16100180Linearencoder(cordlength3m)Ⅱ165SuperPrecisionPositioningTableTXuperPrecisionPositionngTableTXCADInstructionmanual