>> P.175
BallscrewLinearLinearencoderHeadScaleSuperPrecisionPositioningTableTXTX・・・MSlidetableLinearRollerWayBallscrewLimitsensorY-tableBedCTX・・・MX-tableMajorproductspecificationsAccuracyDrivingmethodPrecisionballscrewPositioningrepeatability±0.0005~0.0010LinearmotionrollingguideLinearRollerWay(rollertype)Positioningaccuracy0.003~0.020Built-inlubricationpartLubricationpart"C-Lube"isbuilt-inLostmotion0.001MaterialoftableandbedCastironParallelismintablemotionA0.005~0.011SensorProvidedasstandardParallelismintablemotionB-unit:mmAttitudeaccuracyStraightnessBacklash5~11sec0.003~0.008-Ⅱ151