>> P.158
MountingFortheprocessingaccuracyofthePrecisionPositioningTablemountingsurfaceandthetighteningtorqueofthefixingscrews,seepageⅢ-36.SensorSpecificationTable11.1Sensortimingchart(withoutbellows)CWCCWABONCDOFFStrokelength(E)(F)OriginOFFPre-originOFFCCWlimitCWlimitMechanicalstopperModelandsizeBallscrewleadTSLH120MTSLH220MTSLH320MTSLH420M510510510510A50454545B510510510510C37373737D30303030E5.51412202018unit:mmF4.51010151515Remarks1.Fordetailedspecificationsofrespectivesensors,pleaseseethesectionofsensorspecificationinGeneralExplanation.2.Thevaluesofrespectiveaxesintablesoftwo-axisspecificationarethesameasthoseoftablesofsingle-axisspecification.Ⅱ134