>> P.22
1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameter1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterCleanlinessclass3isachieved!Stainlesssheetwithexcellentcorrosionresistanceandsidecoversealupdrivepartsandslidetableguidingparts.Stainlesssheetispressedontothesidecoverbyresinrollerwithintheslidetable.Thestructurewhichensuresproperattractionbythestrongmagnetsheetpreventsdustfromgeneratingtothesurroundingofthetablebyairsuctionfromthesealedinternalspace.TC···EBCleanroomPrecisionPositioningTableTCUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass1MeasurementvalueUpperlimitofclass2Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass1Upperlimitofclass2TC50EB150(Ballscrewlead:4mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterStrokelengthSpeedSuctionamount:50mm:200mm/s:5L/minTC50EB300(Ballscrewlead:8mm)1000001000010001001010.1μmormore0.2μmormore0.3μmormore0.5μmormoreParticlediameterStrokelengthSpeedSuctionamount:200mm:400mm/s:10L/minTC60EB300(Ballscrewlead:10mm)StrokelengthSpeedSuctionamount:200mm:500mm/s:30L/minTC60EB600(Ballscrewlead:10mm)StrokelengthSpeedSuctionamount:500mm:500mm/s:30L/minTC86EB640(Ballscrewlead:20mm)StrokelengthSpeedSuctionamount:200mm:1000mm/s:70L/minTC86EB940(Ballscrewlead:20mm)StrokelengthSpeedSuctionamount:800mm:560mm/s:40L/minUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1MeasurementvalueUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2MeasurementvalueUpperlimitofclass1Upperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1MeasurementvalueUpperlimitofclass5Upperlimitofclass4Upperlimitofclass3Upperlimitofclass2Upperlimitofclass1MeasurementvalueMeasurementvalueParticleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3Particleconcentrationnumberofparticles/m3ForcleanenvironmentapplicationsⅠ22
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