>> P.19
EvolvingPositioningMechanism②AdoptionofC-LubeLinearRollerWaySuperMXensuresultimaterunningperformance.Fully-closedloopcontrolisestablishedbysuperhighresolutionlinearencodertoensurehighpositioningaccuracyoverthewholestrokelength.TX···M,CTX···MSuperPrecisionPositioningTableTXNT···HNanoLinearNT100200300400Positioningaccuracyμm-10.0-5.00.05.010.0StrokemmTestportion:CTX220M-4030X-axisY-axisCombinationofpartsprocessedwithhighaccuracyandAnti-CreepCageCrossedRollerWayrealizesattitudeaccuracyof5secorless.Variationsinattitudeduetomovementisminimized,whichensureshighpositioningrepeatability.Highattitudeaccuracyisrealized!StrokemmAttitudeaccuracysec300-301020304050PitchingYawingAttitudeaccuracy:5secorless0Superhighpositioningaccuracyandresolutionguaranteedwithanonboardsuperhighaccuracylinearencoder!ForhigheraccuracyⅠ19
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