>> P.9
ModelandsizeTX120MTX220MTX320MTX420MCTX20MCTX20M300400500800300×200400×3005,105,105,105,105,105,10500500448448500500Maximumstroke(mm)Maximumspeed(mm/s)Ballscrewlead(mm)PositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashAccuracyModelsandSizeVariations②AVarietyofModelsandVariationsSuperPrecisionPositioningTableTXTX···MCTX···MCleanroomPrecisionPositioningTableTCTC···EBModelandsizeTC50EBTC60EBTC86EB2005008004,85,1010,204005001000Maximumstroke(mm)Maximumspeed(mm/s)Ballscrewlead(mm)PositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashAccuracyBallscrewdriveBallscrewdriveLinearLinearSpecificationSpecificationSeepageⅡ–150SeepageⅡ–172●Achievedultimatepositioningperformancewithrollingguidetype●Fully-closedloopcontrolequippedwithsuperhighaccuracylinearencoderensuringhighaccuracy●Controlmethodselectableaccordingtoneeds●LongtermmaintenancefreespecificationwithC-Lubebuiltin●OptionalforuseinhighcleanlinessenvironmentforsemiconductorandLCDmanufacturingmachines●Lightweight,lowprofileandcompactpositioningtable●Compatiblewithcleanlinessclass3●LongtermmaintenancefreespecificationwithC-Lubebuiltin(Single-axisspecification)(Two-axisspecification)Ⅰ9
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