>> P.9
ModelsandSizeVariations②AVarietyofModelsandVariationsSuperPrecisionPositioningTableTXBallscrewdriveTX···MCTX···M(Single-axisspecification)(Two-axisspecification)Linear●Achievedultimatepositioningperformancewithrollingguidetype●Fully-closedloopcontrolequippedwithsuperhighaccuracylinearencoderensuringhighaccuracy●Controlmethodselectableaccordingtoneeds●LongtermmaintenancefreespecificationwithC-LubebuiltinSpecificationModelandsizeMaximumstrokeMaximumspeedBallscrewlead(mm)(mm/s)(mm)120MTX220MTX320MTX420MTXCTX120MCTX220M300400500800300×200400×3005005004484485005005,105,105,105,105,105,10AccuracyPositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashSeepageⅡ–150CleanroomPrecisionPositioningTableTCTC···EBBallscrewdriveLinear●OptionalforuseinhighcleanlinessenvironmentforsemiconductorandLCDmanufacturingmachines●Lightweight,lowprofileandcompactpositioningtable●Compatiblewithcleanlinessclass3●LongtermmaintenancefreespecificationwithC-LubebuiltinSpecificationModelandsizeMaximumstrokeMaximumspeedBallscrewlead(mm)(mm/s)TC50EBTC60EBTC86EB2005008004005001000Ⅰ9(mm)4,85,1010,20AccuracyPositioningrepeatabilityPositioningaccuracyLostmotionParallelismintablemotionAParallelismintablemotionBAttitudeaccuracyStraightnessBacklashSeepageⅡ–172
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