>> P.176
表5线性编码器的标记线性编码器的种类无线性编码器增量型线性编码器绝对值型线性编码器标记S0000SA000SC000SB010SB020SB040SB050SB100SB200SD010SD020SD040SD050SD100SD200SE050SF050SG050支持的AC伺服电机-(株)安川电机制Σ-7三菱电机(株)制J4(1)及松下(株)制MINASA6(株)安川电机制Σ-7三菱电机(株)制J4松下(株)制MINASA6分解能[μm]-可变可变0.010.020.040.050.10.20.010.020.040.050.10.20.050.050.05线性编码器型号-海德汉(株)制LIF181R雷尼绍(株)制TONiC海德汉(株)制LIF181R雷尼绍(株)制VIONiC雷尼绍(株)制RESOLUTE驱动器请准备MR-J4-***-RJ。注(1)备注1.SA000、SC000的分解能可变的详情请参照表7。2.线性编码器的规格请参照表11。诸特性行程长度X轴Y轴重复定位精度定位精度无效运动(1)工作台运动的姿势精度(2)秒56567677898911单位mm垂直直线度水平直线度XY运动的垂直度-0.0030.0040.0030.004-0.0050.0040.0050.0050.0060.0080.0050.0060.008--0.0050.0100.0050.010Ⅱ-1520.001平行度A0.0050.0060.0050.0010.0060.0010.0010.0070.0060.0070.0070.0080.0090.0010.0080.0010.0090.011100150200250300150200250300400300400500500600800100200200300200300300400100100200200200200300300±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)±0.0005(±0.001)0.003(0.006)0.004(0.008)0.003(0.006)0.004(0.008)0.005(0.013)0.004(0.008)0.005(0.013)0.005(0.013)0.006(0.016)0.008(0.020)0.005(0.007)0.005(0.010)0.006(0.010)0.008(0.010)表6精度型号及大小尺寸TX120MTX220MTX320MTX420MCTX120MCTX220M单轴规格双轴规格注(1)(2)备注无线性编码器时表示背隙值。表示俯仰及摇摆。()内表示无线性编码器时的值。