>> P.32
Fluctuationdata1Superlowfluctuationisachieved!About50%lessfluctuationcomparedwiththestandardextralongunit!23Therunningdeflectionvalueiswithin0.0090μm(9.0nm)inactualmeasurement!ImprovemachiningqualitywiththeuseofMXMasterGrade!-0.5050100150-0.3-0.10.10.30.5Runningdeflection[μm]Runningdeflection[μm]Distance(mm)Distance(mm)0.0090m(9.0nm)0.050.040.030.020.010-0.01-0.02-0.03-0.04-0.058090100110120Fluctuationcomparisondata00.020.040.060.080.1MXD35MXDG35MXDL35MXDL35StandardunitRunningdeflection[μm]LongunitExtralongunitExtralongunit(Lowfluctuationspecifiications)About90%lessAbout50%lessFeaturesStandardLongExtralongElasticdeformationrelativetoloadislowincomparisonwiththestandardandlongtypes,devicerigidityisimproved,accuracyisimproved,andresonancecanbeavoided.MeasuringmethodSpecialracewayprocessingsuppressesminisculerunningdeflectionandsignificantlyreducespulsationcomparedtostandardextralongunits.Pulsation:ReferstotherunningdeflectionrelatedtomovementoftherollingelementswithintheLinearRollerWay.Measurestheverticalrunoutwhenthetableismoved.Lowfluctuationmakesitidealforultra-precisionworkingmachineshaftguides,whichrequirehigh-precision,high-qualitymachining.Theextralongunitcontributestoimprovedloadcapacityandrigidityinmechanicalequipment.Ⅰ-32
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